The latest Si-MOSFET (Superjunction MOSFET) introduced by VBsemi Microgreen Semiconductor is a new product with excellent performance and a wide range of applications. Si-MOSFET can be divided into planar gate MOSFET and superjunction MOSFET based on the manufacturing process. When the rated voltage is increased, the drift layer of the planar gate MOSFET will become thicker, leading to an increase in on-state resistance. The superjunction MOSFET solves this problem by arranging multiple vertical pn junction structures at the D and S terminals, achieving a reduction in on-state resistance while maintaining high voltage.

【Theoretical Limit of Silicon and Superjunction Beyond Silicon】

The advantage of the superjunction MOSFET lies in its high voltage resistance and low resistance characteristics. Compared with ordinary high-voltage VDMOS, the on-state resistance of the superjunction MOSFET is much smaller, making it suitable for high-energy efficiency and high-power density fast switching applications. In addition, the higher the rated voltage of the superjunction MOSFET, the more significant the decrease in on-state resistance, making it ideal for high-speed operation at medium and low power levels.

【Left is Planar MOS, Right is Superjunction MOS】

The manufacturing process of the superjunction MOSFET is more complex than that of conventional MOSFETs, mainly reflected in the trench filling epitaxial manufacturing method. The superjunction MOSFET achieves low on-state resistance products by minimizing the trench width and depth and designing an N-layer with low resistance.

【In the superjunction, trr is faster than the planar MOSFET, and irr current is larger】

Compared with the planar MOSFET, the superjunction MOSFET has a larger pn junction area, so there are some problems in terms of reverse current of the internal diode and reverse recovery time. Although the trr of the superjunction MOSFET is faster than that of the planar MOSFET, the irr current is larger.

Here is a comparison between the conventional manufacturing process of Si-MOSFET and the superjunction manufacturing process:

【Conventional MOS Manufacturing Process】

【Superjunction Trench Filling Epitaxial Manufacturing Method】

In addition, Si-MOSFET is also compared with other devices in terms of power and frequency, such as IGBT, silicon carbide MOS, planar/superjunction MOS, etc.

【Comparison of Power and Frequency of IGBT, Silicon Carbide MOS, Planar/Superjunction MOS】

Microgreen Semiconductor's Si-MOSFET series products have been widely used in various fields due to their advanced production technology, excellent performance, and reliable quality. Si-MOSFET is suitable for power supply, motor control, lighting, and other fields, especially for high-speed operation requirements at medium and low power levels.

Here are some key features and advantages of Si-MOSFET:

High Voltage Resistance: Si-MOSFET has a high rated voltage and can operate stably in high-voltage environments.

Low On-state Resistance: The on-state resistance of Si-MOSFET is much smaller than that of traditional planar MOSFET, providing higher efficiency and power density.

High-speed Switching: The superjunction structure of Si-MOSFET gives it fast switching characteristics, suitable for high-frequency applications.

Reliability: Si-MOSFET has reliable product quality, stable performance, and is suitable for various harsh working environments.

【VBsemi Si-MOSFET Partial Model Display】

Microgreen Semiconductor's Si-MOSFET series products will be showcased at the 2023 Munich Shanghai Electronics Exhibition. The exhibition will be held from July 11th to 13th, 2023 at the Shanghai National Convention and Exhibition Center. The latest Si-MOSFET product series, including SJ-MOSFET, SGT-MOSFET, planar and trench process MOSFETs, and IGBTs, will be showcased.

【VBsemi New Product Parameter Display】

As a national-level high-tech enterprise, Microgreen Semiconductor is committed to advancing semiconductor device technology and providing innovative solutions for customers.

Therefore, we sincerely invite both new and old customers to visit Microgreen Semiconductor's booth 7.2H-A606 at the 2023 Munich Shanghai Electronics Exhibition. This will be an excellent opportunity to learn about the latest semiconductor device technologies and trends. We look forward to your visit!